Silicon Photonics Fabrication

Our NanoSOI process enables researchers and industry professionals to rapidly prototype silicon photonic and MEMS devices. Devices are manufactured using a state-of-the-art electron beam lithography system. The next submission deadline will be Monday, June 12 2017 Р11:59 PM MST. We offer:

  • Patterning on 220 or 300 nm SOI
  • Oxide cladding deposition
  • Options such as metallization