Silicon Photonics Fabrication

Our process enables researchers and industrial professionals to rapidly prototype silicon photonic and MEMS devices. Devices are manufactured using a state-of-the-art electron beam lithography system. The next submission deadline will be Monday, April 6, 2020 Monday, April 20, 2020 Р6:00 PM MST. We offer:

  • Patterning on 220 nm SOI (or custom)
  • Oxide cladding or bare silicon
  • Options: metallization, edge couplers