Silicon Photonics Fabrication

Our NanoSOI process enables researchers and industry professionals to rapidly prototype silicon photonic and MEMS devices. Devices are manufactured using a state-of-the-art electron beam lithography system. The next submission deadline will be Monday, October 7, 2019 Р6:00 PM MDT. We offer:

  • Patterning on 220 nm SOI (or custom)
  • Oxide cladding deposition
  • Options: metallization, edge couplers