Silicon Photonics Fabrication

Our NanoSOI process enables researchers and industry professionals to rapidly prototype silicon photonic and MEMS devices. Devices are manufactured using a state-of-the-art electron beam lithography system. The next submission deadline will be Friday, October 12, 2018 – 9:00 PM MDT. We offer:

  • Patterning on 220 or 300 nm SOI
  • Oxide cladding deposition
  • Options such as metallization