Enabling Nanotechnology
Zone Plates, X-ray Optics, and Silicon Photonics

We offer a range of nanotechnology based tools, offering the highest resolution and efficiency commercially available Fresnel x-ray zone plates down to 15 nm, high resolution calibration standards for optical and x-ray wavelengths, and a powerful silicon photonics platform (nanoSOI) for fabricating NEMS, terahertz and silicon photonic devices.

Our specialized fabrication capabilities include electron-beam lithography, nanoimprint lithography, nanoscale glass lithography, plasma etching, thin-film deposition, and extreme high aspect ratio electrochemical plating.