Customizable High-Resolution Calibration Standards
The ANT calibration standard was designed for the highest resolution requirements of X-Ray imaging systems with nanoscale features. Available for both soft and hard X-Ray regimes, EUV and optical setups.
Nested Ls or elbows allow for high resolution measurements with guaranteed pitch and efficiency. Down to 15 nm half-pitch on high resolution standard.
Siemen star patterns allow for calibration and accurate comparison of the resolution of optics for X-Ray and other imaging methods.
Applied Nanotools has included the USAF 1951 resolution test chart but with features in nanometres instead of micrometres.
These 50/50 duty cycle grating…
Custom designs and logos can be added to designs, see pricing for more information on costs.
Our standard frame size is 5 mm x 5 mm. We also offer custom frame sizes. Membrane thickness can be down to 50 nm and silicon carbide membranes are available for those requiring long-lifetime membranes.
The dimensions of the our lightweight aluminum holder are 14 mm tall x 14 mm wide x 3 mm deep and simplify handling of the calibration standards.
|Ultra-High Resolution Soft X-Ray Calibration Standard (70 nm Au) (15 nm half pitch)||USD $5000|
|Soft X-Ray Calibration Standard (150 nm Au) (25 nm half pitch or better)||USD $4500|
|Hard X-Ray Calibration Standard (>600 nm Au) (40 nm half-pitch or better)||USD $6000|
• Nested L’s
• Siemen star patterns (large and small)
• Varying pitch gratings and mesh
• Nano USAF 1951
|Custom Options||Extra Fee|
|Custom Logo (Max 50 µm2 area)||$1000|
|Low stress 50 nm silicon nitride membrane||$1000/order|
|Low stress 200 nm silicon carbide membrane||$1000/order|
|Fused Silica Substrate (~500 um thick) •Chrome metal on glass (positive tone-only) >60 nm thickness||$1000/order|
|Negative polarity (features transparent) • 40 nm minimum feature size (soft X-ray) • 80 nm minimum feature size (hard X-ray)||$1250|
|Custom chip sizes||Contact us|