Customizable High-Resolution Calibration Standards
The ANT calibration standard was designed for the highest resolution requirements of X-Ray imaging systems with nanoscale features. Available for both soft and hard X-Ray regimes, EUV and optical setups.
Nested Ls or elbows allow for high resolution measurements with guaranteed pitch and efficiency. Down to 15 nm half-pitch on high resolution standard.
Siemen star patterns allow for calibration and accurate comparison of the resolution of optics for X-Ray and other imaging methods.
Applied Nanotools has included the USAF 1951 resolution test chart but with features in nanometres instead of micrometres.
These 50/50 duty cycle grating…
Custom designs and logos can be added to designs, see pricing for more information on costs.
Our standard frame size is 5 mm x 5 mm. We also offer custom frame sizes. Membrane thickness can be down to 50 nm and silicon carbide membranes are available for those requiring long-lifetime membranes.
The dimensions of the our lightweight aluminum holder are 14 mm tall x 14 mm wide x 3 mm deep and simplify handling of the calibration standards.
Options (for different energies)
|EUV Free-standing silicon nanoUSAF1951 (>100 nm Si3N4u) (negative polarity, etched into Si3N4 membrane)||10-90 eV (124-14 nm)|
|Ultra-High Resolution Soft X-Ray Calibration Standard (70 nm Au) (15 nm half pitch)||100 - 500 eV|
|Soft X-Ray Calibration Standard (150 nm Au) (25 nm half pitch or better)||100 - 1000 eV|
|Hard X-Ray Calibration Standard (>600 nm Au) (40 nm half-pitch or better)||100 - 12000 eV|
• Nested L’s
• Siemen star patterns (large and small)
• Varying pitch gratings and mesh
• Nano USAF 1951
|Custom Logo (Max 50 µm2 area)|
|Low stress 50 nm silicon nitride membrane|
|Low stress 200 nm silicon carbide membrane|
|Fused Silica Substrate (~500 um thick) •Chrome metal on glass (positive tone-only) >60 nm thickness|
|Negative polarity (features transparent) • 40 nm minimum feature size (soft X-ray) • 80 nm minimum feature size (hard X-ray)|
|Custom chip sizes|