Calibration Standards

EUV, X-Ray and visible light calibration standards

Customizable High-Resolution Calibration Standards

The ANT calibration standard was designed for the highest resolution requirements of X-Ray imaging systems with nanoscale features. Available for both soft and hard X-Ray regimes, EUV and optical setups.

Nested Ls or elbows allow for high resolution measurements with guaranteed pitch and efficiency. Down to 15 nm half-pitch on high resolution standard.

Siemen star patterns allow for calibration and accurate comparison of the resolution of optics for X-Ray and other imaging methods.

Applied Nanotools has included the USAF 1951 resolution test chart  but with features in nanometres instead of micrometres.

These 50/50 duty cycle grating…

Custom designs and logos can be added to designs, see pricing for more information on costs.

Our standard frame size is 5 mm x 5 mm. We also offer custom frame sizes. Membrane thickness can be down to 50 nm and silicon carbide membranes are available for those requiring long-lifetime membranes.

The dimensions of the our lightweight aluminum holder are 14 mm tall x 14 mm wide x 3 mm deep and simplify handling of the calibration standards.

The Standard Layout

Options (for different energies)

 Device Target Energies
 EUV Free-standing silicon nanoUSAF1951 (>100 nm Si3N4u)

(negative polarity, etched into Si3N4 membrane)
10-90 eV (124-14 nm)
 Ultra-High Resolution Soft X-Ray Calibration Standard (70 nm Au)

(15 nm half pitch)
100 - 500 eV
 Soft X-Ray Calibration Standard (150 nm Au)

(25 nm half pitch or better)
100 - 1000 eV
 Hard X-Ray Calibration Standard (>600 nm Au)

(40 nm half-pitch or better)
100 - 12000 eV

Included Features:
• Nested L’s
• Siemen star patterns (large and small)
• Varying pitch gratings and mesh
• Nano USAF 1951

  Custom Options
Custom Logo (Max 50 µm2 area)
Low stress 50 nm silicon nitride membrane
Low stress 200 nm silicon carbide membrane
Fused Silica Substrate (~500 um thick)

     •Chrome metal on glass (positive tone-only) >60 nm thickness

Negative polarity (features transparent)
     • 40 nm minimum feature size (soft X-ray)

     • 80 nm minimum feature size (hard X-ray)

Custom chip sizes