Resolution down to 20 nm half pitch, or 50,000 line pairs/mm.
Gratings can be fabricated on silicon or glass substrates. For transmission gratings, available substrates include thin silicon nitride, silicon carbide, or silicon membranes with thicknesses between 50 nm to 1000 nm. The substrates can be chosen to suit your application.
High-resolution direct-write patterning allows for custom designs and high efficiency gratings for hard X-ray applications. Gold, nickel, platinum, and tungsten metals with positive and negative-tone patterning are available.
Our custom gratings can be used in synchrotron and lab-based systems for a range of applications. Contact us for more details for your specific needs.