High Resolution Calibration Standards: Overview
Applied Nanotools provides calibration standards for X-Ray, EUV and visible light microscopy for the highest resolution applications. These high quality optics include various calibration elements can be seen in the SEM images below:
|The ANT calibration standard was designed for the highest resolution requirements of X-Ray imaging systems with nanoscale features. Available for soft and hard X-Ray regimes and optical setups.|
|Nested Ls or elbows allow for high resolution measurements with guaranteed pitch and efficiency.|
|Siemen star patterns allow for calibration and accurate comparison of the resolution of optics for X-Ray and other imaging methods.|
|Applied Nanotool’s custom designed NanoUSAF 1951 design is based on the USAF 1951 design but with features in nanometres instead of micrometres.|
|Custom designs and logos can be added to designs, see pricing for more information on costs.|
|Soft X-Ray Calibration Standard (250 nm Au)||USD $4500|
|Hard X-Ray Calibration Standard (>600 nm Au)||USD $6000|
• Nested L’s
• Siemen star patterns (large and small)
• Varying pitch gratings and meshe
• Nano USAF 1951
|• Custom Logo (Max 50 µm2 area)||$1000|
|• Low stress 50 nm silicon nitride membrane||$700|
|• Low stress 100 nm silicon membrane||$1250|
Negative polarity (features transparent)
• 30 nm minimum feature size (soft X-ray)
• 50 nm minimum feature size (hard X-ray)
|• Custom chip sizes||Contact us|
Substrates for different application silicon membranes, silicon nitride membranes, fused silica and many other types of substrates. Calibration standards with features down to 20 nm can be provided. For more information please fill out the online form or to get a direct quote. All our optics are guaranteed to meet the outlined specifications including absolute pitch and efficiency.
Custom designs can be added with facility logo with high resolution features (minimum element size of 50 nm recommended). Graphics must be provided in either a GDSII, EPS or vector format for best resolution. Contact us if you need help with the logo submission.
Note: final design may not be exactly as shown.