NanoSOI Design Center - Dashboard

News
  • January 2024 Si MPW Run

    December 21, 2023

    The next Silicon MPW submission deadline is 6:00 PM MDT, Tuesday January 9, 2024. If you would like your design to be reviewed by ANT staff before the final submission deadline, please submit your request to support@appliednt.com by 6:00 PM MDT, Tuesday January 2, 2024. Note that Applied Nanotools will be closed starting December 23rd until January 2nd.

    • September Si MPW Run Postponed to September 12, 2023

      August 2, 2023

      The next Silicon MPW submission deadline has been moved to 6:00 PM MDT, Tuesday September 12, 2023. Please note that this is postponed by roughly a week from the original start submission deadline of September 5, 2023. Please contact support@appliednt.com if you have any questions.

      • SiN Heater Design Rule Amended

        April 17, 2023

        Due to recent process yield issues, the silicon nitride (SiN) heater width and spacing design rule has been amended from 3 μm to 5μm (GDS Layer 11). Note that this only impacts silicon nitride design submissions, and that the silicon design rules are unaffected by this change.

      • PDK Upgraded to Version 7.0

        April 4, 2023

        The PDK has been upgraded to Version 7 to include many new components and revised grating couplers with improved centering at 1550 nm. Click here to download the new PDK and see the full list of changes.

      • 2023 MPW Dates Announced

        October 20, 2022

        The 2023 MPW dates for Silicon and Silicon Nitride have been posted.

      • PDK Upgraded to Version 6.2

        October 20, 2022

        The PDK has been upgraded to Version 6.2. This version fixes an incompatibility with SiEPIC Tools waveguide routing. Click here to download the new PDK and see the full list of changes.

      • PDK Upgraded to Version 6.1

        January 24, 2022

        The PDK has been upgraded to Version 6.1. This version fixes several bugs, including with waveguide routing and library display. Click here to download the new PDK and see the full list of changes.

      • Silicon Nitride MPW Runs are now available

        October 6, 2021

        The first NanoSOI silicon nitride MPW run is now open for submissions. The run deadline is 6:00 PM MDT October 26, 2021. Design rules, process specifications, and the silicon nitride PDK are all available on the NanoSOI Design Center.

      • PDK Upgraded to Version 5

        July 9, 2021

        The PDK has been upgraded to Version 5. This version includes new grating coupler designs validated with our vertical etch process, and compatibility with SiEPIC Tools. Click here to download the new PDK and see the full list of changes.

      • May 2021 Run Deadline

        April 24, 2021

        The next MPW submission deadline is 6:00 PM MDT, Tuesday May 25, 2021. Click here for the 2021 MPW run schedule.

      • April 2021 Run Deadline

        March 4, 2021

        The next MPW submission deadline is 6:00 PM MDT, Tuesday April 6, 2021. Click here for the 2021 MPW run schedule.

      • February 2021 Run Deadline and Important Process Changes

        February 3, 2021

        The next MPW submission deadline is 6:00 PM MST, Tuesday Feburary 9, 2021. This run will feature an improved etch process that provides vertical waveguide sidewalls while maintaining low propagation losses. Due to unexpected and intermittent issues experienced with the old etch process/tool, this change is expected to be permanent. Please contact support@appliednt.com if you have any questions.

      • January 2021 Run Deadline

        December 26, 2020

        The next MPW submission deadline is 6:00 PM MST, Tuesday January 5th, 2021. Click here for the 2021 MPW run schedule.

      • October 2020 Run Deadline

        September 16, 2020

        The next MPW submission deadline is 6:00 PM MDT, Monday October 5th, 2020. Click here for the 2020 MPW run schedule.

      • August 2020 Run Deadline

        July 23, 2020

        The next MPW submission deadline is 6:00 PM MDT, Monday August 24th, 2020. Click here for the 2020 MPW run schedule.

      • July 2020 Run Deadline

        June 23, 2020

        The next MPW submission deadline is 6:00 PM MDT, Monday July 13th, 2020. Click here for the 2020 MPW run schedule.

      • April MPW Run Deadline Postponed to May 4

        April 13, 2020

        The April MPW deadline has been postponed to 6:00 PM MDT, Monday May 4th, 2020 due to COVID-19 related facility closures. Click here for the updated 2020 MPW run schedule.

      • PDK Version 3.0 Release

        March 23, 2020

        A new version of the NanoSOI PDK (Version 3.0) is now available here. Improvements include new cells to streamline the NanoSOI measurement and packaging services, and an updated layer map including dedicated run layers.

      • April 2020 Run Deadline

        March 9, 2020

        The next MPW submission deadline is 6:00 PM MDT, Monday April 6th, 2020. Click here for the 2020 MPW run schedule.

      • February 2020 Run Deadline and Changes to Deep Trench Process

        January 27, 2020

        The next MPW submission deadline is 6:00 PM MST, Tuesday February 18th, 2020. Click here for the 2020 MPW run schedule. Starting on the February 2020 MPW run, we have made changes to our deep trench process to improve edge coupler yield. We will now be etching only 250 microns into the handle silicon. For a full description of the new process, please visit the updated Deep Trench example page.

      • Website Improvements and Hardware Upgrades

        December 27, 2019

        Our design rule check (DRC) computer hardware has been upgraded to accommodate the increase in order submissions to our service. Designs ran through our design verification checks should now complete faster than before. We have also highlighted some lesser-known dedicated/custom options on our Order Submission Form including positive-tone processing and 300 nm / 500 nm SOI options. Please visit here for a comprehensive list of our processing capabilities.

      • January 2020 Run Deadline

        November 28, 2019

        The next MPW submission deadline is 6:00 PM MST, Monday January 6th, 2020. Click here for the 2020 MPW run schedule.

      • NanoSOI Introductory Webinar

        October 28, 2019

        Applied Nanotools is hosting a webinar to provide an introduction to our NanoSOI fabrication service at 11 AM MST, November 8th, 2019. Please register in advance here. We look forward to seeing you at the webinar!

      • November 2019 Run Deadline and 2020 MPW Schedule

        October 28, 2019

        The next MPW submission deadline is 6:00 PM MST, Monday November 25th, 2019. We have also posted our MPW run schedule for 2020! Click here for the 2019 and 2020 MPW run schedules.

      • October 2019 Run Deadline

        September 24, 2019

        The next MPW submission deadline is 6:00 PM MDT, Monday October 7th, 2019. Click here for the 2019 MPW run schedule.

      • August 2019 Run Deadline

        July 30, 2019

        The next MPW submission deadline is 6:00 PM MDT, Monday August 26th, 2019. Click here for the 2019 MPW run schedule.

      • July 2019 Run Deadline

        July 5, 2019

        The next MPW submission deadline is 6:00 PM MDT, Monday July 15th, 2019. Click here for the 2019 MPW run schedule.

      • June 2019 Run Deadline

        May 19, 2019

        The next MPW submission deadline is 6:00 PM MDT, Monday June 3th, 2019. Click here for the 2019 MPW run schedule.

      • April 2019 Run Deadline

        March 12, 2019

        The next MPW submission deadline is 6:00 PM MDT, Monday April 8th, 2019. Click here for the 2019 MPW run schedule.

      • Updated Propagation Loss Data

        February 7, 2019

        We have updated our propagation loss data to reflect recent improvements to our fabrication process. You can see the latest propagation loss measurements here.

      • February 2019 Run Deadline

        January 16, 2019

        The next MPW submission deadline is 6:00 PM MST, Monday February 11th, 2019. Click here for the 2019 MPW run schedule.

      • Important Changes to Tri-Layer Metallization

        December 7, 2018

        We are implementing updates to our Tri-Layer Metallization process, effective January 1st 2019. The current aluminum routing layer will be replaced with an TiW/Al bilayer in the fabrication process. The bilayer will still use Layer 12 in the GDS file. The updated design rules are located here and the updated process decription is located here. If you have any questions about this change, please contact support@appliednt.com.

      • January 2019 Run Deadline

        December 3, 2018

        The next MPW submission deadline is 6:00 PM MST, Monday January 7th, 2019. The 2019 MPW run schedule has been posted here.

      • New Website Features

        September 24, 2018

        We have added exciting new content to our website! Check out our updated MPW design rules, now conveniently located here.

      • October 2018 Run Deadline

        September 22, 2018

        The next MPW submission deadline is 9:00 PM MDT, Friday, October 12, 2018.

      • August 2018 Run Deadline

        August 7, 2018

        The next MPW submission deadline is 6:00 PM MDT, Sunday, August 26, 2018.

      • June 2018 Run Deadline

        June 1, 2018

        The next MPW submission deadline is 6:00 PM MDT, Sunday, June 24, 2018.

      • May 2018 Run Deadline

        April 2, 2018

        The next MPW submission deadline is 6:00 PM MDT, Thursday May 3, 2018. We are also still in the process of fabricating some outstanding orders from the February/March MPW run due to equipment uptime issues. Your patience is greatly appreciated!

      • February 2018 Run Deadline

        December 13, 2017

        The next MPW submission deadline is 6:00 PM MST, Friday February 9, 2018.

      • October 2017 Run; Process Improvements and Changes

        August 28, 2017

        The next MPW submission deadline is 11:59 PM MDT, Tuesday October 31, 2017. The October run will feature these improvements:

        • Etched TiW heaters, with minimum feature size of 2 μm
        • Protective oxide layer on heaters for improved robustness
        • Updated deep trench specifications
        • Improvements to online submission system for large GDS designs

        The design rules will be updated with these new specifications soon.

      • August 2017 Run Deadline

        July 15, 2017

        We will be offering another silicon photonics MPW run in August 2017. The submission deadline is 11:59 PM MDT, Tuesday August 1, 2017. The run afterward will be performed in early October (tentatively).

      • June 2017 Run Deadline

        June 12, 2017

        We will be offering another silicon photonics MPW run in June 2017. The submission deadline is 11:59 PM MDT, Monday June 12, 2017. The run afterward will be performed in early August.

      • April 2017 Run Deadline

        April 3, 2017

        We will be offering another silicon photonics MPW run in April 2017. The submission deadline is 11:59 PM MST, Tuesday April 4, 2017.

      • Extended March 2017 Run Deadline

        March 8, 2017

        The submission deadline has been extended to 11:59 PM MST, Friday, March 17, 2017 for the next NanoSOI MPW Run.

      • Upcoming March 2017 Run

        January 24, 2017

        We will be offering another silicon photonics MPW run in March 2017. The submission deadline is 11:59 PM MST, Saturday, March 11, 2017.

      • Qualification Results - December 2016

        December 21, 2016

        Applied Nanotools has completed a recent test of the propagation loss for strip waveguides made from 220 nm SOI, 2 micron BOX. Updated propagation loss numbers can be found here.

      • Upcoming January 2017 Run; Buffer Oxide Change

        October 17, 2016

        We will be offering another silicon photonics MPW run in January 2017. The submission deadline is 11:59 PM MST, Friday, December 30, 2016. Please note that as of this run, we will be transitioning our 220 nm SOI fabrication to 2.0 μm buffer oxide. This change from 3.0 μm is a result of our wafer supplier discontinuing the 3.0 μm product. Although this wafer choice will further align our e-beam process with large-scale foundry services, the change may impact some designs that have been optimized for 3 μm BOX.

      • Upcoming Fabrication Run: October 2016

        August 20, 2016

        We are performing our second fabrication run on October 10th, 2016 (extended from September 25, 2016). The deadline for submissions is 11:59 PM MST